Use of dielectric slots for reducing via resistance in dual damascene process

ABSTRACT

An integrated circuit may include dual damascene interconnects formed using a via-first dual damascene process or a trench-first dual damascene process. The via-first process may be a partial-via-first process or a full-via-first process. A trench mask for a wide interconnect line which is at least twice as wide as a dual damascene via in the wide interconnect line may have a dielectric slot adjacent to the dual damascene via. The dual damascene via is laterally separated from the dielectric slot by no more than half a width of the dual damascene via.

CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims the benefit of priority under U.S.C. §119(e) ofU.S. Provisional Application 61/916,840, filed Dec. 17, 2013, which ishereby incorporated by reference in its entirety.

FIELD OF THE INVENTION

This invention relates to the field of integrated circuits. Moreparticularly, this invention relates to metal interconnects inintegrated circuits.

BACKGROUND OF THE INVENTION

An integrated circuit contains vias formed using a dual damasceneprocess. Some of the vias are formed in interconnect lines which aresignificantly wider than minimum width interconnect lines at the samelevel. Dual damascene vias in wide interconnect lines have flaredprofiles in which the tops of the vias are significantly wider than thebottoms of the vias. Flaring leads to more liner metal in the bottom ofthe vias, disadvantageously causing higher and/or erratic viaresistance.

SUMMARY OF THE INVENTION

The following presents a simplified summary in order to provide a basicunderstanding of one or more aspects of the invention. This summary isnot an extensive overview of the invention, and is neither intended toidentify key or critical elements of the invention, nor to delineate thescope thereof. Rather, the primary purpose of the summary is to presentsome concepts of the invention in a simplified form as a prelude to amore detailed description that is presented later.

An integrated circuit and a method of manufacturing the integratedcircuit may include dual damascene interconnects. A trench mask for aninterconnect line which is at least twice as wide as a dual damascenevia in the interconnect line may have a dielectric slot adjacent to thedual damascene via. The dual damascene via is laterally separated fromthe dielectric slot by no more than half a width of the dual damascenevia.

DESCRIPTION OF THE VIEWS OF THE DRAWING

FIG. 1A through FIG. 1J are cross sections of an example integratedcircuit containing dielectric slots adjacent to a dual damascene via,formed with a via-first dual damascene process, depicted in successivestages of fabrication.

FIG. 2A through FIG. 2G are cross sections of an example integratedcircuit containing dielectric slots adjacent to a dual damascene via,formed with a trench-first dual damascene process, depicted insuccessive stages of fabrication.

FIG. 3A and FIG. 3B are cross sections of an example integrated circuitcontaining a dielectric slot adjacent to a dual damascene via.

FIG. 4A and FIG. 4B are cross sections of an example integrated circuitcontaining a dielectric slot adjacent to two dual damascene vias.

FIG. 5A and FIG. 5B are cross sections of an example integrated circuitcontaining two dielectric slots adjacent to four dual damascene vias.

FIG. 6A and FIG. 6B are cross sections of an example integrated circuitcontaining a dielectric slot adjacent to four dual damascene vias.

DETAILED DESCRIPTION OF EXAMPLE EMBODIMENTS

The present invention is described with reference to the attachedfigures. The figures are not drawn to scale and they are provided merelyto illustrate the invention. Several aspects of the invention aredescribed below with reference to example applications for illustration.It should be understood that numerous specific details, relationships,and methods are set forth to provide an understanding of the invention.One skilled in the relevant art, however, will readily recognize thatthe invention can be practiced without one or more of the specificdetails or with other methods. In other instances, well-known structuresor operations are not shown in detail to avoid obscuring the invention.The present invention is not limited by the illustrated ordering of actsor events, as some acts may occur in different orders and/orconcurrently with other acts or events. Furthermore, not all illustratedacts or events are required to implement a methodology in accordancewith the present invention.

An integrated circuit may include dual damascene interconnects formedusing a via-first dual damascene process or a trench-first dualdamascene process. The via-first process may be a partial-via-firstprocess or a full-via-first process. A trench mask for a wideinterconnect line which is at least twice as wide as a dual damascenevia in the wide interconnect line may have a dielectric slot adjacent tothe dual damascene via. The dual damascene via is laterally separatedfrom the dielectric slot by no more than half a width of the dualdamascene via. The wide interconnect line may include more than onedielectric slot adjacent to the dual damascene via. The wideinterconnect line may include more than one dual damascene via adjacentto the dielectric slot.

FIG. 1A through FIG. 1J are cross sections of an example integratedcircuit containing dielectric slots adjacent to a dual damascene via,formed with a via-first dual damascene process, depicted in successivestages of fabrication. Referring to FIG. 1A, the integrated circuit 100includes a lower dielectric layer 102, which may be, for example, apre-metal dielectric (PMD) layer, an intra-metal dielectric (IMD) layeror an inter-level dielectric (ILD) layer. The lower dielectric layer 102may include, for example, silicon dioxide based dielectric material suchas organo-silicate glass (OSG), carbon-doped silicon oxides (SiCO orCDO) or porous OSG (p-OSG). The lower dielectric layer 102 may beformed, for example, using a plasma enhanced chemical vapor deposition(PECVD) process, a sub-atmospheric chemical vapor deposition (SACVD)process, or other process appropriate for forming the lower dielectriclayer 102. The lower dielectric layer 102 may also include a cap layerand/or an etch stop layer, which are not shown so as to more clearlyillustrate key features of the instant example.

A lower metal interconnect 104 is formed in the integrated circuit 100,disposed in the lower dielectric layer 102. The lower metal interconnect104 may have a damascene metal liner 106 and a damascene fill metal 108as depicted in FIG. 1A and be formed with a damascene process in thelower dielectric layer 102. Alternatively, the lower metal interconnect104 may be formed by etching a layer of interconnect metal andsubsequently forming the lower dielectric layer 102 around the lowermetal interconnect 104. The lower metal interconnect 104 is depicted inFIG. 1A as an interconnect line, but may be an interconnect pillar or acontact to a substrate of the integrated circuit 100.

Referring to FIG. 1B, an ILD layer 110 is formed over the lowerdielectric layer 102 and the lower metal interconnect 104. The ILD layer110 may include, for example, silicon dioxide based dielectric materialsuch as OSG, CDO or p-OSG. The ILD layer 110 may also include a caplayer and/or an etch stop layer, which are not shown so as to moreclearly illustrate key features of the instant example.

Referring to FIG. 1C, a via etch mask 112 is formed over the ILD layer110 so as to expose an area for a dual damascene via over the lowermetal interconnect 104. The via etch mask 112 may include photoresistformed by a photolithographic process. Alternatively, the via etch mask112 may include hard mask material such as silicon nitride, siliconcarbide, amorphous carbon, and such, formed by a selective reactive ionetch (RIE) process through a photoresist mask.

Referring to FIG. 1D, a via etch process removes material from the ILDlayer 110 in the area exposed by the via etch mask 112 to form a viahole 114 in the ILD layer 110. In one version of the instant example,using a partial-via-first dual damascene process, the via hole 114 mayextend partway to the lower metal interconnect 104 as depicted in FIG.1D. In an alternate version, using a full-via-first dual damasceneprocess, the via hole 114 may extend to an etch stop layer over thelower metal interconnect 104 or may extend substantially to the lowermetal interconnect 104. The via etch process may include one or more RIEsteps as appropriate for cap layers, silicon dioxide based dielectricmaterial and/or etch stop layers. The via etch process may be a timedetch or may be endpointed.

Referring to FIG. 1E, a remaining portion of the via etch mask 112 ofFIG. 1D is removed after the via etch process is completed. The via etchmask 112 may be removed, for example, by a plasma etch process usingoxygen radicals, such as an ash process.

Referring to FIG. 1F, a trench etch mask 116 is formed over the ILDlayer 110 so as to expose an area for a dual damascene trench whichincludes the via hole 114. The trench etch mask 116 may includephotoresist or may include hard mask material, as described in referenceto the via etch mask 112 of FIG. 1C. In the instant example, the trenchetch mask 116 covers areas for dielectric slots 118 adjacent to the viahole 114. In the instant example, the areas for the dielectric slots 118extend to edges of the area exposed for the dual damascene trench.

Referring to FIG. 1G, a trench etch process removes material from theILD layer 110 in the area exposed by the trench etch mask 116 to form adual damascene trench 120 in the ILD layer 110. The trench etch processconcurrently deepens the via hole 114 if any dielectric material remainsin the ILD layer 110 under the via hole 114. The trench etch process mayinclude one or more RIE steps as appropriate for cap layers, silicondioxide based dielectric material and/or etch stop layers. The trenchetch process may be a timed etch or may be endpointed. Dielectricmaterial of the ILD layer 110 in the areas of the dielectric slots 118is not removed by the trench etch process. During the trench etchprocess, the via hole 114 may become flared, that is, may have a shallowslope, on sides which are not adjacent to the dielectric slots 118,compared to sides of the via hole 114 which are adjacent to thedielectric slots 118. Flaring of the via hole 114 may result, forexample, from access to the via hole 114 by reactive species in thetrench etch process; such access is blocked by the trench etch mask 116over the dielectric slots 118.

Referring to FIG. 1H, the trench etch mask 116 is removed after thetrench etch process is completed. The trench etch mask 116 may beremoved, for example, by a plasma etch process using oxygen radicals,such as an ash process. The trench etch mask 116 may possibly be removedprior to etching through an etch stop layer or cap layer over the lowermetal interconnect 104.

Referring to FIG. 1I, a dual damascene liner 122 is formed in the dualdamascene trench 120 and via hole 114. The dual damascene liner 122 mayinclude, for example, a layer of tantalum nitride, tantalum, titanium ortitanium nitride, followed by a layer of sputtered copper. The dualdamascene liner 122 extends onto the lower metal interconnect 104. Athickness of the dual damascene liner 122 on the lower metalinterconnect 104 may be determined by a total amount of flaring of thevia hole 114. Forming the dielectric slots 118 adjacent to the via hole114 may reduce the total amount of flaring of the via hole 114 which mayin turn advantageously reduce the thickness of the dual damascene liner122 on a top surface of the lower metal interconnect 104 inside the viahole 114.

A dual damascene fill metal 124 is formed on the dual damascene liner122. The dual damascene fill metal 124 may be, for example,electroplated copper. The dual damascene fill metal 124 and the dualdamascene liner 122 are removed from a top surface of the ILD layer 110,for example, using a chemical mechanical polish (CMP) process, to form adual damascene upper metal interconnect 126 and a dual damascene via128, both of which include the dual damascene fill metal 124 and thedual damascene liner 122. The dual damascene via 128 provides anelectrical connection between the dual damascene upper metalinterconnect 126 and the lower metal interconnect 104. An electricalresistance from the dual damascene upper metal interconnect 126 throughthe dual damascene via 128 to the lower metal interconnect 104 mayadvantageously be reduced by the lower thickness of the dual damasceneliner 122 on the lower metal interconnect 104, resulting from thedielectric slots 118 adjacent to the via hole 114. Lateral dimensions ofthe dielectric slots 118 may be selected so that electrical resistanceof the dual damascene upper metal interconnect 126 meets a desiredvalue.

FIG. 1J is another view of the integrated circuit 100 at the samefabrication stage as depicted in FIG. 1I, showing a more complete viewof the dielectric slots 118. A lateral position of the dual damascenevia 128 is indicated by a dashed loop to show its lateral proximity tothe dielectric slots 118. A lateral separation 130 between eachdielectric slot 118 and the dual damascene via 128 is less than half awidth 132 of the dual damascene via 128. In the instant example, a width134 of the dual damascene upper metal interconnect 126 is at least twicethe width 132 of the dual damascene via 128.

FIG. 2A through FIG. 2G are cross sections of an example integratedcircuit containing dielectric slots adjacent to a dual damascene via,formed with a trench-first dual damascene process, depicted insuccessive stages of fabrication. Referring to FIG. 2A, the integratedcircuit 200 includes a lower dielectric layer 202 as described inreference to FIG. 1A. A lower metal interconnect 204, possibly includinga damascene metal liner 206 and a damascene fill metal 208 as depictedin FIG. 2A, is formed in the integrated circuit 200, disposed in thelower dielectric layer 202, for example, as described in reference toFIG. 1A. An ILD layer 210 is formed over the lower dielectric layer 202and the lower metal interconnect 204.

A trench etch mask 216 is formed over the ILD layer 210 so as to exposean area for a dual damascene trench. The trench etch mask 216 mayinclude photoresist or may include hard mask material, as described inreference to the via etch mask 112 of FIG. 1C. In the instant example,the trench etch mask 216 covers areas for dielectric slots 218 adjacentto a subsequently formed via hole. In the instant example, the areas forthe dielectric slots 218 are surrounded by the area exposed for the dualdamascene trench.

Referring to FIG. 2B, a trench etch process removes material from theILD layer 210 in the area exposed by the trench etch mask 216 to form adual damascene trench 220. The trench etch process may include one ormore RIE steps as appropriate for cap layers, silicon dioxide baseddielectric material and/or etch stop layers. The trench etch process maybe a timed etch or may be endpointed. Dielectric material of the ILDlayer 210 in the areas of the dielectric slots 218 is not removed by thetrench etch process.

Referring to FIG. 2C, the trench etch mask 216 is removed after thetrench etch process is completed. The trench etch mask 216 may beremoved, for example, similarly to removal of the trench etch mask 116as described with respect to FIG. 1H.

Referring to FIG. 2D, a via etch mask 212 is formed over the ILD layer210 and in the dual damascene trench 220 so as to expose an area for adual damascene via over the lower metal interconnect 204. The areaexposed for the dual damascene via is at a bottom surface of the dualdamascene trench 220 between the dielectric slots 218.

Referring to FIG. 2E, a via etch process removes material from the ILDlayer 210 in the area exposed by the via etch mask 212 to form a viahole 214. The via hole 214 may extend to an etch stop layer over thelower metal interconnect 204 or may extend substantially to the lowermetal interconnect 204. The via etch process may include one or more RIEsteps as appropriate for cap layers, silicon dioxide based dielectricmaterial and/or etch stop layers. During the via etch process, the viahole 214 may become flared on sides which are not adjacent to thedielectric slots 218, compared to sides of the via hole 214 which areadjacent to the dielectric slots 218, as explained in reference to FIG.1G. The via etch mask 212 is removed after the via etch process iscompleted, for example as described in reference to FIG. 1E. The viaetch mask 212 may possibly be removed prior to etching through an etchstop layer or cap layer over the lower metal interconnect 204.

Referring to FIG. 2F, a dual damascene liner 222 is formed in the dualdamascene trench 220 and via hole 214 as described in reference to FIG.1I. The dual damascene liner 222 extends onto the lower metalinterconnect 204 in the via hole 214. A thickness of the dual damasceneliner 222 on the lower metal interconnect 204 may be determined by atotal amount of flaring of the via hole 214. Forming the dielectricslots 218 adjacent to the via hole 214 may reduce the total amount offlaring of the via hole 214 which may in turn advantageously reduce thethickness of the dual damascene liner 222 on a top surface of the lowermetal interconnect 204 in the via hole 214.

A dual damascene fill metal 224 is formed on the dual damascene liner222 as described in reference to FIG. 1I. The dual damascene fill metal224 and the dual damascene liner 222 is removed from a top surface ofthe ILD layer 210 to form a dual damascene upper metal interconnect 226and a dual damascene via 228, both of which include the dual damascenefill metal 224 and the dual damascene liner 222. An electricalresistance from the dual damascene upper metal interconnect 226 throughthe dual damascene via 228 to the lower metal interconnect 204 mayadvantageously be reduced by the lower thickness of the dual damasceneliner 222 on the lower metal interconnect 204, resulting from thedielectric slots 218 being formed adjacent to the via hole 214. Lateraldimensions of the dielectric slots 218 may be selected so thatelectrical resistance of the dual damascene upper metal interconnect 226meets a desired value.

FIG. 2G is another view of the integrated circuit 200 at the samefabrication stage as depicted in FIG. 2F, showing a more complete viewof the dielectric slots 218. A lateral position of the dual damascenevia 228 is indicated by a dashed loop to show its lateral proximity tothe dielectric slots 218. A lateral separation 230 between eachdielectric slot 218 and the dual damascene via 228 is less than half awidth 232 of the dual damascene via 228. In the instant example, a width234 of the dual damascene upper metal interconnect 226 is at least twicethe width 232 of the dual damascene via 228.

FIG. 3A and FIG. 3B are cross sections of an example integrated circuitcontaining a dielectric slot adjacent to a dual damascene via. Referringto FIG. 3A, the integrated circuit 300 includes a lower dielectric layer302 and a lower metal interconnect 304, possibly including a damascenemetal liner 306 and a damascene fill metal 308, disposed in the lowerdielectric layer 302, as described in reference to FIG. 1A. An ILD layer310 is formed over the lower dielectric layer 302 and the lower metalinterconnect 304.

A dual damascene upper metal interconnect 326 and a dual damascene via328, both of which include a dual damascene fill metal 324 and a dualdamascene liner 322, are formed in the ILD layer 310. The dual damasceneupper metal interconnect 326 and the dual damascene via 328 may beformed, for example, using a via-first process sequence as described inreference to FIG. 1A through FIG. 1J, or using a trench-first processsequence as described in reference to FIG. 2A through FIG. 2G. Adielectric slot 318 is formed in the dual damascene upper metalinterconnect 326 adjacent to the dual damascene via 328, as described inreference to FIG. 1A through FIG. 1J or to FIG. 2A through FIG. 2G.

Forming the dielectric slot 318 adjacent to the dual damascene via 328may reduce a total amount of flaring of a via hole 314 in which the dualdamascene via 328 is formed, which may in turn advantageously reduce athickness of the dual damascene liner 322 on a top surface of the lowermetal interconnect 304 in the via hole 314. An electrical resistancefrom the dual damascene upper metal interconnect 326 through the dualdamascene via 328 to the lower metal interconnect 304 may advantageouslybe reduced by the lower thickness of the dual damascene liner 322 on thelower metal interconnect 304, resulting from the dielectric slot 318being formed adjacent to the via hole 314. Lateral dimensions of thedielectric slot 318 may be selected so that electrical resistance of thedual damascene upper metal interconnect 326 meets a desired value.

FIG. 3B is another view of the integrated circuit 300, showing a morecomplete view of the dielectric slot 318. A lateral position of the dualdamascene via 328 is indicated by a dashed loop to show its lateralproximity to the dielectric slot 318. A lateral separation 330 betweenthe dielectric slot 318 and the dual damascene via 328 is less than halfa width 332 of the dual damascene via 328. In the instant example, awidth 334 of the dual damascene upper metal interconnect 326 is at leasttwice the width 332 of the dual damascene via 328.

FIG. 4A and FIG. 4B are cross sections of an example integrated circuitcontaining a dielectric slot adjacent to two dual damascene vias.Referring to FIG. 4A, the integrated circuit 400 includes a lowerdielectric layer 402 and a lower metal interconnect 404, possiblyincluding a damascene metal liner 406 and a damascene fill metal 408,disposed in the lower dielectric layer 402, as described in reference toFIG. 1A. An ILD layer 410 is formed over the lower dielectric layer 402and the lower metal interconnect 404.

A dual damascene upper metal interconnect 426 and two dual damascenevias 428, all of which include a dual damascene fill metal 424 and adual damascene liner 422, are formed in the ILD layer 410. The dualdamascene upper metal interconnect 426 and the dual damascene via 428may be formed, for example, using a via-first process sequence or usinga trench-first process sequence. A dielectric slot 418 is formed in thedual damascene upper metal interconnect 426 adjacent to and between thedual damascene vias 428.

Forming the dielectric slot 418 adjacent to the two dual damascene vias428 may reduce a total amount of flaring of each via hole 414 in whicheach dual damascene via 428 is formed, which may in turn advantageouslyreduce a thickness of the dual damascene liner 422 on the lower metalinterconnect 404 in the via hole 414. An electrical resistance from thedual damascene upper metal interconnect 426 through the dual damascenevias 428 to the lower metal interconnect 404 may advantageously bereduced by the lower thickness of the dual damascene liner 422 on thelower metal interconnect 404, resulting from the dielectric slot 418being formed adjacent to the via holes 414. Lateral dimensions of thedielectric slot 418 may be selected so that electrical resistance of thedual damascene upper metal interconnect 426 meets a desired value.

FIG. 4B is another view of the integrated circuit 400, showing a morecomplete view of the dielectric slot 418. Lateral positions of the dualdamascene vias 428 are indicated by dashed loops to show their lateralproximity to the dielectric slot 418. Lateral separations 430 betweenthe dielectric slot 418 and the dual damascene vias 428 are less thanhalf a width 432 of each dual damascene via 428. In the instant example,a width 434 of the dual damascene upper metal interconnect 426 is atleast twice the width 432 of each dual damascene via 428.

FIG. 5A and FIG. 5B are cross sections of an example integrated circuitcontaining two dielectric slots adjacent to four dual damascene vias.Referring to FIG. 5A, the integrated circuit 500 includes a lowerdielectric layer 502 and a lower metal interconnect 504, possiblyincluding a damascene metal liner 506 and a damascene fill metal 508,disposed in the lower dielectric layer 502, as described in reference toFIG. 1A. An ILD layer 510 is formed over the lower dielectric layer 502and the lower metal interconnect 504.

A dual damascene upper metal interconnect 526 and four dual damascenevias 528, all of which include a dual damascene fill metal 524 and adual damascene liner 522, are formed in the ILD layer 510. The dualdamascene upper metal interconnect 526 and the dual damascene via 528may be formed, for example, using a via-first process sequence or usinga trench-first process sequence. Two dielectric slots 518 proximate toeach other are formed in the dual damascene upper metal interconnect526, each being adjacent to and between two instances of the dualdamascene vias 528.

Forming each dielectric slot 518 adjacent to two dual damascene vias 528may reduce a total amount of flaring of each via hole 514 in which eachdual damascene via 528 is formed, which may in turn advantageouslyreduce a thickness of the dual damascene liner 522 on the lower metalinterconnect 504 in the via hole 514. An electrical resistance from thedual damascene upper metal interconnect 526 through the dual damascenevias 528 to the lower metal interconnect 504 may advantageously bereduced by the lower thickness of the dual damascene liner 522 on thelower metal interconnect 504, resulting from the dielectric slots 518being formed adjacent to the via holes 514. Lateral dimensions of thedielectric slots 518 may be selected so that electrical resistance ofthe dual damascene upper metal interconnect 526 meets a desired value.

FIG. 5B is another view of the integrated circuit 500, showing a morecomplete view of the dielectric slot 518. Lateral positions of the dualdamascene vias 528 are indicated by dashed loops to show their lateralproximity to the dielectric slots 518. Lateral separations 530 betweeneach dielectric slot 518 and the adjacent instances of the dualdamascene vias 528 are less than half a width 532 of each dual damascenevia 528. In the instant example, a width 534 of the dual damascene uppermetal interconnect 526 is at least three times the width 532 of eachdual damascene via 528.

FIG. 6A and FIG. 6B are cross sections of an example integrated circuitcontaining a dielectric slot adjacent to four dual damascene vias.Referring to FIG. 6A, the integrated circuit 600 includes a lowerdielectric layer 602 and a lower metal interconnect 604, possiblyincluding a damascene metal liner 606 and a damascene fill metal 608,disposed in the lower dielectric layer 602, as described in reference toFIG. 1A. An ILD layer 610 is formed over the lower dielectric layer 602and the lower metal interconnect 604.

A dual damascene upper metal interconnect 626 and four dual damascenevias 628, all of which include a dual damascene fill metal 624 and adual damascene liner 622, are formed in the ILD layer 610. The dualdamascene upper metal interconnect 626 and the dual damascene via 628may be formed, for example, using a via-first process sequence or usinga trench-first process sequence. An elongated dielectric slot 618 isformed in the dual damascene upper metal interconnect 626 adjacent toand between the dual damascene vias 628.

Forming the dielectric slot 618 adjacent to the dual damascene vias 628may reduce a total amount of flaring of each via hole 614 in which eachdual damascene via 628 is formed, which may in turn advantageouslyreduce a thickness of the dual damascene liner 622 on the lower metalinterconnect 604 in the via hole 614. An electrical resistance from thedual damascene upper metal interconnect 626 through the dual damascenevias 628 to the lower metal interconnect 604 may advantageously bereduced by the lower thickness of the dual damascene liner 622 on thelower metal interconnect 604, resulting from the dielectric slots 618being formed adjacent to the via holes 614. Lateral dimensions of thedielectric slots 618 may be selected so that electrical resistance ofthe dual damascene upper metal interconnect 626 meets a desired value.

FIG. 6B is another view of the integrated circuit 600, showing a morecomplete view of the dielectric slot 618. Lateral positions of the dualdamascene vias 628 are indicated by dashed loops to show their lateralproximity to the dielectric slot 618. Lateral separations 630 betweenthe dielectric slot 618 and the dual damascene vias 628 are less thanhalf a width 632 of each dual damascene via 628. In the instant example,a width 634 of the dual damascene upper metal interconnect 626 is atleast three times the width 632 of each dual damascene via 628.

While various embodiments of the present invention have been describedabove, it should be understood that they have been presented by way ofexample only and not limitation. Numerous changes to the disclosedembodiments can be made in accordance with the disclosure herein withoutdeparting from the spirit or scope of the invention. Thus, the breadthand scope of the present invention should not be limited by any of theabove described embodiments. Rather, the scope of the invention shouldbe defined in accordance with the following claims and theirequivalents.

What is claimed is:
 1. An integrated circuit, comprising: a lowerdielectric layer; a lower metal interconnect disposed in the lowerdielectric layer; an inter-level dielectric (ILD) layer disposed overthe lower dielectric layer and the lower metal interconnect; a dualdamascene upper metal interconnect disposed in the ILD layer over thelower metal interconnect, the dual damascene upper metal interconnectincluding a dual damascene liner and a dual damascene fill metal; a dualdamascene via disposed between the dual damascene upper metalinterconnect and the lower metal interconnect, the dual damascene viaincluding the dual damascene liner and the dual damascene fill metal,the dual damascene via making electrical connection to the lower metalinterconnect, the dual damascene liner in the dual damascene viaextending onto the lower metal interconnect, a width of the dualdamascene upper metal interconnect being at least twice a width of thedual damascene via; and a dielectric slot disposed in the dual damasceneupper metal interconnect adjacent to the dual damascene via, a lateralseparation between the dielectric slot and the dual damascene via beingless than half of the width of the dual damascene via.
 2. The integratedcircuit of claim 1, wherein: the dielectric slot is a first dielectricslot which extends to a first edge of the dual damascene upper metalinterconnect; and the integrated circuit comprises a second dielectricslot disposed in the dual damascene upper metal interconnect adjacent tothe dual damascene via, the second dielectric slot extending to asecond, opposite, edge of the dual damascene upper metal interconnect, alateral separation between the second dielectric slot and the dualdamascene via being less than half of the width of the dual damascenevia.
 3. The integrated circuit of claim 1, wherein: the dielectric slotis a first dielectric slot which is surrounded by the dual damasceneupper metal interconnect; and the integrated circuit comprises a seconddielectric slot disposed in the dual damascene upper metal interconnectadjacent to the dual damascene via opposite from the first dielectricslot, the second dielectric slot being surrounded by the dual damasceneupper metal interconnect, a lateral separation between the seconddielectric slot and the dual damascene via being less than half of thewidth of the dual damascene via.
 4. The integrated circuit of claim 1,wherein the dielectric slot is surrounded by the dual damascene uppermetal interconnect.
 5. The integrated circuit of claim 1, wherein: thedielectric slot is surrounded by the dual damascene upper metalinterconnect; the dual damascene via is a first dual damascene via; andthe integrated circuit comprises a second dual damascene via disposed inthe dual damascene upper metal interconnect adjacent to the dielectricslot opposite from the first dual damascene via, the second dualdamascene via making electrical connection to the lower metalinterconnect, the dual damascene liner in the second dual damascene viaextending onto the lower metal interconnect, a lateral separationbetween the second dual damascene via and the dielectric slot being lessthan half of the width of the second dual damascene via.
 6. Theintegrated circuit of claim 1, wherein: the dielectric slot is a firstdielectric slot which is surrounded by the dual damascene upper metalinterconnect; the integrated circuit comprises a second dielectric slotdisposed in the dual damascene upper metal interconnect proximate to thefirst dielectric slot, the second dielectric slot being surrounded bythe dual damascene upper metal interconnect; the dual damascene via is afirst dual damascene via; the integrated circuit comprises a second dualdamascene via in the dual damascene upper metal interconnect adjacent tothe first dielectric slot opposite from the first dual damascene via,the second dual damascene via making electrical connection to the lowermetal interconnect, the dual damascene liner in the second dualdamascene via extending onto the lower metal interconnect, a lateralseparation between the second dual damascene via and the firstdielectric slot being less than half of the width of the second dualdamascene via; the integrated circuit comprises a third dual damascenevia in the dual damascene upper metal interconnect adjacent to thesecond dielectric slot, the third dual damascene via making electricalconnection to the lower metal interconnect, the third dual damasceneliner in the dual damascene via extending onto the lower metalinterconnect, a lateral separation between the third dual damascene viaand the second dielectric slot being less than half of the width of thethird dual damascene via; and the integrated circuit comprises a fourthdual damascene via disposed in the dual damascene upper metalinterconnect adjacent to the second dielectric slot opposite from thethird dual damascene via, the fourth dual damascene via makingelectrical connection to the lower metal interconnect, the dualdamascene liner in the fourth dual damascene via extending onto thelower metal interconnect, a lateral separation between the fourth dualdamascene via and the second dielectric slot being less than half of thewidth of the fourth dual damascene via.
 7. The integrated circuit ofclaim 1, wherein: the dual damascene via is a first dual damascene via;the integrated circuit comprises a second dual damascene via in the dualdamascene upper metal interconnect adjacent to the dielectric slotopposite from the first dual damascene via, the second dual damascenevia making electrical connection to the lower metal interconnect, thedual damascene liner in the second dual damascene via extending onto thelower metal interconnect, a lateral separation between the second dualdamascene via and the dielectric slot being less than half of the widthof the second dual damascene via; the integrated circuit comprises athird dual damascene via in the dual damascene upper metal interconnectadjacent to the second dielectric slot proximate to the first dualdamascene via, the third dual damascene via making electrical connectionto the lower metal interconnect, the dual damascene liner in the thirddual damascene via extending onto the lower metal interconnect, alateral separation between the third dual damascene via and thedielectric slot being less than half of the width of the third dualdamascene via; and the integrated circuit comprises a fourth dualdamascene via disposed in the dual damascene upper metal interconnectadjacent to the dielectric slot opposite from the third dual damascenevia, the fourth dual damascene via making electrical connection to thelower metal interconnect, the dual damascene liner in the fourth dualdamascene via extending onto the lower metal interconnect, a lateralseparation between the fourth dual damascene via and the dielectric slotbeing less than half of the width of the fourth dual damascene via.
 8. Amethod of forming an integrated circuit, comprising the steps of:providing a lower dielectric layer; forming a lower metal interconnect,the lower metal interconnect being disposed in the lower dielectriclayer; forming an ILD layer over the lower dielectric layer and thelower metal interconnect; forming a via etch mask over the ILD layer, sothat the via etch mask exposes an area for a dual damascene via over thelower metal interconnect; removing material from the ILD layer in thearea exposed by the via etch mask to form a via hole in the ILD layer;removing the via etch mask after the via hole is formed; forming atrench etch mask over the ILD layer so that the trench etch mask exposesan area for a dual damascene trench which includes the via hole, so thatthe trench etch mask covers an area for a dielectric slot adjacent tothe via hole; removing material from the ILD layer in the area exposedby the trench etch mask to form the dual damascene trench in the ILDlayer, and concurrently deepening the via hole; removing the trench etchmask after the dual damascene trench is formed; forming a dual damasceneliner in the dual damascene trench and the via hole, so that the dualdamascene liner extends onto the lower metal interconnect in the viahole; forming a dual damascene fill metal on the dual damascene liner;and removing the dual damascene fill metal and the dual damascene linerfrom over a top surface of the ILD layer to form a dual damascene uppermetal interconnect and a dual damascene via, the dual damascene viaproviding an electrical connection between the dual damascene uppermetal interconnect and the lower metal interconnect, so that a width ofthe dual damascene upper metal interconnect is at least twice a width ofthe dual damascene via, and so that a lateral separation between thedielectric slot and the dual damascene via being less than half of thewidth of the dual damascene via.
 9. The method of claim 8, wherein: thedielectric slot is a first dielectric slot, the area for the firstdielectric slot extending to a first edge of the area for the dualdamascene trench; the trench etch mask covers an area for a seconddielectric slot adjacent to the via hole, the area for the seconddielectric slot extending to a second, opposite, edge of the area forthe dual damascene trench; and a lateral separation between the seconddielectric slot and the dual damascene via is less than half of thewidth of the dual damascene via.
 10. The method of claim 8, wherein: thedielectric slot is a first dielectric slot, the area for the firstdielectric slot being surrounded by the area for the dual damascenetrench; the trench etch mask covers an area for a second dielectric slotadjacent to the via hole opposite from the area for the first dielectricslot, the area for the second dielectric slot being surrounded by thearea for the dual damascene trench; and a lateral separation between thesecond dielectric slot and the dual damascene via is less than half ofthe width of the dual damascene via.
 11. The method of claim 8, whereinthe area for the first dielectric slot is surrounded by the area for thedual damascene trench.
 12. The method of claim 8, wherein: the area forthe dielectric slot is surrounded by the area for the dual damascenetrench; the dual damascene via is a first dual damascene via; the viaetch mask exposes an area for a second dual damascene via over the lowermetal interconnect, the area for a second dual damascene via beingadjacent to the area for the dielectric slot opposite from the area forthe first dual damascene via; the via hole is a first hole, located inthe area for the first dual damascene via; the step of removing materialfrom the ILD layer in the area exposed by the via etch mask forms asecond via hole in the area for the second dual damascene via; the areafor the dual damascene trench includes the second via hole; the step ofremoving material from the ILD layer in the area exposed by the trenchetch mask concurrently deepens the second via hole; the step of formingthe dual damascene liner is performed so that the dual damascene linerextends onto the lower metal interconnect in the second via hole; thestep of removing the dual damascene fill metal and the dual damasceneliner from over a top surface of the ILD layer forms the second dualdamascene via, the second dual damascene via providing an electricalconnection between the dual damascene upper metal interconnect and thelower metal interconnect, so that the width of the dual damascene uppermetal interconnect is at least twice a width of the second dualdamascene via, and so that a lateral separation between the dielectricslot and the second dual damascene via being less than half of the widthof the second dual damascene via.
 13. The method of claim 8, wherein:the dielectric slot is a first dielectric slot, the area for the firstdielectric slot being surrounded by the area for the dual damascenetrench; the trench etch mask covers an area for a second dielectric slotproximate to the area for the first dielectric slot, the area for thesecond dielectric slot being surrounded by the area for the dualdamascene trench; the dual damascene via is a first dual damascene via;the via etch mask exposes: an area for a second dual damascene via overthe lower metal interconnect, the area for the second dual damascene viabeing adjacent to the area for the first dielectric slot opposite fromthe area for the first dual damascene via; an area for a third dualdamascene via over the lower metal interconnect, the area for the thirddual damascene via being adjacent to the area for the second dielectricslot and proximate to the area for the first dual damascene via; and anarea for a fourth dual damascene via over the lower metal interconnect,the area for the fourth dual damascene via being adjacent to the areafor the second dielectric slot opposite from the area for the third dualdamascene via; the via hole is a first hole, located in the area for thefirst dual damascene via; the step of removing material from the ILDlayer in the area exposed by the via etch mask forms a second via holein the area for the second dual damascene via, a third via hole in thearea for the third dual damascene via, and a fourth via hole in the areafor the fourth dual damascene via; the area for the dual damascenetrench includes the second via hole, the third via hole and the fourthvia hole; the step of removing material from the ILD layer in the areaexposed by the trench etch mask concurrently deepens the second viahole, the third via hole and the fourth via hole; the step of formingthe dual damascene liner is performed so that the dual damascene linerextends onto the lower metal interconnect in the second via hole, thethird via hole and the fourth via hole; the step of removing the dualdamascene fill metal and the dual damascene liner from over a topsurface of the ILD layer forms the second dual damascene via, the seconddual damascene via providing an electrical connection between the dualdamascene upper metal interconnect and the lower metal interconnect, sothat the width of the dual damascene upper metal interconnect is atleast twice a width of the second dual damascene via, and so that alateral separation between the first dielectric slot and the second dualdamascene via is less than half of the width of the second dualdamascene via; the step of removing the dual damascene fill metal andthe dual damascene liner from over a top surface of the ILD layer formsthe third dual damascene via, the third dual damascene via providing anelectrical connection between the dual damascene upper metalinterconnect and the lower metal interconnect, so that the width of thedual damascene upper metal interconnect is at least twice a width of thethird dual damascene via, and so that a lateral separation between thesecond dielectric slot and the third dual damascene via is less thanhalf of the width of the third dual damascene via; and the step ofremoving the dual damascene fill metal and the dual damascene liner fromover a top surface of the ILD layer forms the fourth dual damascene via,the fourth dual damascene via providing an electrical connection betweenthe dual damascene upper metal interconnect and the lower metalinterconnect, so that the width of the dual damascene upper metalinterconnect is at least twice a width of the fourth dual damascene via,and so that a lateral separation between the second dielectric slot andthe fourth dual damascene via is less than half of the width of thefourth dual damascene via.
 14. The method of claim 8, wherein: the areafor the dielectric slot is surrounded by the area for the dual damascenetrench; the dual damascene via is a first dual damascene via; the viaetch mask exposes: an area for a second dual damascene via over thelower metal interconnect, the area for the second dual damascene viabeing adjacent to the area for the dielectric slot opposite from thearea for the first dual damascene via; an area for a third dualdamascene via over the lower metal interconnect, the area for the thirddual damascene via being adjacent to the area for the dielectric slotand proximate to the area for the first dual damascene via; and an areafor a fourth dual damascene via over the lower metal interconnect, thearea for the fourth dual damascene via being adjacent to the area forthe dielectric slot opposite from the area for the third dual damascenevia; the via hole is a first hole, located in the area for the firstdual damascene via; the step of removing material from the ILD layer inthe area exposed by the via etch mask forms a second via hole in thearea for the second dual damascene via, a third via hole in the area forthe third dual damascene via, and a fourth via hole in the area for thefourth dual damascene via; the area for the dual damascene trenchincludes the second via hole, the third via hole and the fourth viahole; the step of removing material from the ILD layer in the areaexposed by the trench etch mask concurrently deepens the second viahole, the third via hole and the fourth via hole; the step of formingthe dual damascene liner is performed so that the dual damascene linerextends onto the lower metal interconnect in the second via hole, thethird via hole and the fourth via hole; the step of removing the dualdamascene fill metal and the dual damascene liner from over a topsurface of the ILD layer forms the second dual damascene via, the seconddual damascene via providing an electrical connection between the dualdamascene upper metal interconnect and the lower metal interconnect, sothat the width of the dual damascene upper metal interconnect is atleast twice a width of the second dual damascene via, and so that alateral separation between the dielectric slot and the second dualdamascene via is less than half of the width of the second dualdamascene via; the step of removing the dual damascene fill metal andthe dual damascene liner from over a top surface of the ILD layer formsthe third dual damascene via, the third dual damascene via providing anelectrical connection between the dual damascene upper metalinterconnect and the lower metal interconnect, so that the width of thedual damascene upper metal interconnect is at least twice a width of thethird dual damascene via, and so that a lateral separation between thedielectric slot and the third dual damascene via is less than half ofthe width of the third dual damascene via; and the step of removing thedual damascene fill metal and the dual damascene liner from over a topsurface of the ILD layer forms the fourth dual damascene via, the fourthdual damascene via providing an electrical connection between the dualdamascene upper metal interconnect and the lower metal interconnect, sothat the width of the dual damascene upper metal interconnect is atleast twice a width of the fourth dual damascene via, and so that alateral separation between the dielectric slot and the fourth dualdamascene via is less than half of the width of the fourth dualdamascene via.
 15. A method of forming an integrated circuit, comprisingthe steps of: providing a lower dielectric layer; forming a lower metalinterconnect, the lower metal interconnect being disposed in the lowerdielectric layer; forming an ILD layer over the lower dielectric layerand the lower metal interconnect; forming a trench etch mask over theILD layer so that the trench etch mask exposes an area for a dualdamascene trench, so that the trench etch mask covers an area for adielectric slot; removing material from the ILD layer in the areaexposed by the trench etch mask to form the dual damascene trench in theILD layer; removing the trench etch mask after the dual damascene trenchis formed; forming a via etch mask over the ILD layer and in the dualdamascene trench, so that the via etch mask exposes an area for a dualdamascene via in the dual damascene trench adjacent to the dielectricslot and over the lower metal interconnect; removing material from theILD layer in the area exposed by the via etch mask to form a via hole inthe ILD layer adjacent to the dielectric slot; removing the via etchmask after the via hole is formed; forming a dual damascene liner in thedual damascene trench and the via hole, so that the dual damascene linerextends onto the lower metal interconnect in the via hole; forming adual damascene fill metal on the dual damascene liner; and removing thedual damascene fill metal and the dual damascene liner from over a topsurface of the ILD layer to form a dual damascene upper metalinterconnect and a dual damascene via, the dual damascene via providingan electrical connection between the dual damascene upper metalinterconnect and the lower metal interconnect, so that a width of thedual damascene upper metal interconnect is at least twice a width of thedual damascene via, and so that a lateral separation between thedielectric slot and the dual damascene via being less than half of thewidth of the dual damascene via.
 16. The method of claim 15, wherein:the dielectric slot is a first dielectric slot, the area for the firstdielectric slot extending to a first edge of the area for the dualdamascene trench; the trench etch mask covers an area for a seconddielectric slot, the area for the second dielectric slot extending to asecond, opposite, edge of the area for the dual damascene trench; thearea for the dual damascene via is adjacent to the second dielectricslot; and a lateral separation between the second dielectric slot andthe dual damascene via is less than half of the width of the dualdamascene via.
 17. The method of claim 15, wherein: the dielectric slotis a first dielectric slot, the area for the first dielectric slot beingsurrounded by the area for the dual damascene trench; the trench etchmask covers an area for a second dielectric slot proximate to the areafor the first dielectric slot, the area for the second dielectric slotbeing surrounded by the area for the dual damascene trench; the area forthe dual damascene via is adjacent to the second dielectric slot; and alateral separation between the second dielectric slot and the dualdamascene via is less than half of the width of the dual damascene via.18. The method of claim 15, wherein the area for the first dielectricslot is surrounded by the area for the dual damascene trench.
 19. Themethod of claim 15, wherein: the area for the dielectric slot issurrounded by the area for the dual damascene trench; the dual damascenevia is a first dual damascene via; the via etch mask exposes an area fora second dual damascene via in the dual damascene trench adjacent to thedielectric slot, opposite from the area for the first dual damascenevia, and over the lower metal interconnect; the via hole is a firsthole, located in the area for the first dual damascene via; the step ofremoving material from the ILD layer in the area exposed by the via etchmask forms a second via hole in the area for the second dual damascenevia; the step of forming the dual damascene liner is performed so thatthe dual damascene liner extends onto the lower metal interconnect inthe second via hole; the step of removing the dual damascene fill metaland the dual damascene liner from over a top surface of the ILD layerforms the second dual damascene via, the second dual damascene viaproviding an electrical connection between the dual damascene uppermetal interconnect and the lower metal interconnect, so that the widthof the dual damascene upper metal interconnect is at least twice a widthof the second dual damascene via, and so that a lateral separationbetween the dielectric slot and the second dual damascene via being lessthan half of the width of the second dual damascene via.
 20. The methodof claim 15, wherein: the area for the dielectric slot is surrounded bythe area for the dual damascene trench; the dual damascene via is afirst dual damascene via; the via etch mask exposes: an area for asecond dual damascene via in the dual damascene trench adjacent to thedielectric slot, opposite from the area for the first dual damascenevia, and over the lower metal interconnect; an area for a third dualdamascene via in the dual damascene trench adjacent to the dielectricslot, proximate to the area for the first dual damascene via, and overthe lower metal interconnect; and an area for a fourth dual damascenevia in the dual damascene trench adjacent to the dielectric slot,opposite from the area for the third dual damascene via, and over thelower metal interconnect; the via hole is a first hole, located in thearea for the first dual damascene via; the step of removing materialfrom the ILD layer in the area exposed by the via etch mask forms asecond via hole in the area for the second dual damascene via, a thirdvia hole in the area for the third dual damascene via, and a fourth viahole in the area for the fourth dual damascene via; the area for thedual damascene trench includes the second via hole, the third via holeand the fourth via hole; the step of removing material from the ILDlayer in the area exposed by the trench etch mask concurrently deepensthe second via hole, the third via hole and the fourth via hole; thestep of forming the dual damascene liner is performed so that the dualdamascene liner extends onto the lower metal interconnect in the secondvia hole, the third via hole and the fourth via hole; the step ofremoving the dual damascene fill metal and the dual damascene liner fromover a top surface of the ILD layer forms the second dual damascene via,the second dual damascene via providing an electrical connection betweenthe dual damascene upper metal interconnect and the lower metalinterconnect, so that the width of the dual damascene upper metalinterconnect is at least twice a width of the second dual damascene via,and so that a lateral separation between the dielectric slot and thesecond dual damascene via is less than half of the width of the seconddual damascene via; the step of removing the dual damascene fill metaland the dual damascene liner from over a top surface of the ILD layerforms the third dual damascene via, the third dual damascene viaproviding an electrical connection between the dual damascene uppermetal interconnect and the lower metal interconnect, so that the widthof the dual damascene upper metal interconnect is at least twice a widthof the third dual damascene via, and so that a lateral separationbetween the dielectric slot and the third dual damascene via is lessthan half of the width of the third dual damascene via; and the step ofremoving the dual damascene fill metal and the dual damascene liner fromover a top surface of the ILD layer forms the fourth dual damascene via,the fourth dual damascene via providing an electrical connection betweenthe dual damascene upper metal interconnect and the lower metalinterconnect, so that the width of the dual damascene upper metalinterconnect is at least twice a width of the fourth dual damascene via,and so that a lateral separation between the dielectric slot and thefourth dual damascene via is less than half of the width of the fourthdual damascene via.